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digital microscope HD801
3D & 2D Digital Microscope and Measurement Systems
Infared Microscope IR-2200
 
  • Infared Microscope IR-2200


 


IR-2200 Microscope System enables the user to inspect sub-surface images including MEMS device, 3D stacks, incoming wafers, photovoltaic and wafer level CSP’s with an astonishing level of precision; while offering many capabilities and flexibility not available with traditional microscopes.

The IR-2200 system integrates the infrared table top microscope system with software and 4.1 Megapixel USB-3.0 NIR Camera.
This system provides all necessary features for high precision measurements, image capture, verification and inspection of materials transparent to the near infrared (NIR) / Shortwave Infrared (SWIR) wavelengths.


Capture

» Capture from a wide variety of cameras and frame grabbers.
» Control camera parameters like exposure, gain, and gamma from within the application.
» Display user congurable color mapping of up to 16-bit monochrome data.
» Capture single frames to BMP, JPEG, RAW, or TIFF.
» Capture image sequences to AVI or RAW.
» Extensive array of lter options (average, low/high pass, median, laplace, etc.)
» Built in non-uniformity correction

Analyze

» Full image and ROI histograms and plotting capabilities.
» Optional feature segmentation using thresholding capabilities to extract blobs and other feature types.
» Data export to Microsoft Excel.
» Extensible with support for custom image acquisition drivers, image processing functions, image feature identication ,and custom charts written in C/C++, C#, or VB.NET.

IR-2200 Specifications

Spectral sensitivity range from 400nm - 1100nm

M. Plan APO Objectives 2.5X 5X 10X 20X
Working Distance 32.0 mm 35.1 mm 36.9 mm 22.0 mm
Focal Distance 80.0 mm 40 mm 20 mm 10 mm
NA 0.06 0.15 0.25 0.4
Resolution 4.6 um 1.7 um 1.2 um 0.8 um
Focal Depth 76.4 um 10.7 um 4.4 um 2.2 um
Wavelength 0.4 um - 1.1 um 0.4 um - 1.1 um 0.4 um - 1.1 um 0.4 um - 1.1 um

** The resolution is calculated as a theoretical resolution based on NA of wavelength 550nm.


Spectral sensitivity range from 900nm - 2000nm

Objectives 1.0X 2.5X 10X 20X 50X 100X 20X 50X
Working Distance 12 mm 28.0 mm 30.7 mm 12 mm 10 mm 10 mm 10 mm 10 mm
Focal Distance 200 mm 80 mm 20 mm 10 mm 4 mm 2 mm 10 mm 4 mm
NA 0.03 0.1 0.27 0.5 0.6 0.75 0.6 0.71
Resolution 18.4 um 0.3 um 2.5 um 1.1 um 0.9 um 0.7 um 1.5 um 1.2 um
Focal Depth 611 um 55 um 7.5 um 2.2 um 1.5 um 0.9 um 2.15 um 1.58 um
Wavelength 0.8 - 1.6 um 0.45 - 1.6 um 0.48 - 1.6 um 0.8 - 1.6 um 0.9 - 1.6 um 0.9 - 1.6 um 1 - 2 um 1 - 2 um

** The resolution is calculated as a theoretical resolution based on NA of wavelength 1100nm.
** Last 2 columns resolution is calculated as a theoretical resolution based on NA of wavelength of 1550nm.

Other Specifications

Illumination Koehler illumination
Turrent 4 nose manual turret
Stand Coarse/Fine Z focus
Stage Coarse manual XY stage
Camera Cooled Ingas camera
Silicon based option for NIR application (740nm-1100nm)

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